激光法制备纳米a-Si_xN_y:H的光谱及键结构研究

STRUCTURE OF THE SPECTRA AND BONDING STRUCTURE OF LASER-PREPARED NANOMETER a-Si_xN_y:H MATERIAL

用红外吸收光谱和喇曼光谱对激光法制备的纳米a-Si_xN_y:H粉末及其加压成形块体的键结构进行研究,发现在a-Si_xN_y:H中存在着Si-N,Si-Si,Si-H,N-H,Si-O-Si及OH基团,讨论了块体及其退火后光谱畸变和键结构变化。

The bonding structure of laser-prepared nanometer a-SixNy:H powder and the bulk body prepared by pressing of powder are studied by IR and Raman spectroscopy. It is found that there are Si-N Si-Si, Si-H, N-H, Si-O-Si bonds and OH group in a-SixNy:H. The distortion of the spectra and the change of bonding structure of the bulk body before and after annealing are discussed.