摘要
提出了一种对金属光洁精密零件的厚度和柱、球的直径进行不接触测量的方法。这是用一组固定的麦克尔逊干涉系统和另一组可在精密导轨上移动的麦克尔逊干涉系统组成,利用白光零级干涉条纹不接触定位进行测量。理论分析和实验结果均表明,这种方法可行并有高的测量精度。
A noncontaet measurement method of the thickness or the diameter of cylinder and sphere of clean precision metal parts has been proposed. The apparatus consists of two mchlson interferometer systems, in which one is fixed and the other can move in a precision rack. The test is operated by using white light zero order interference fringes as a noncontact positioning. It shows that the method is feasible and also has high measurement accaracy by theoretrical analysis and the experiment result.
出处
《西安工业学院学报》
1993年第1期15-20,共6页
Journal of Xi'an Institute of Technology
关键词
不接触测量法
长度
金属
精密零件
interferometry noncontact measurement method length measurement
