超高真空密封材料的进步

Advance in Sealing Materials Used for Superhigh Vacuum

氟橡胶具有的优异性能,使之在耐高温、耐油、耐高真空密封制品的生产中得到迅速发展。本文着重介绍了作为超高真空密封材料的氟橡胶26的热稳定性、透气性、真空出气率和失重等。并简要介绍了当前国内氟橡胶在超高真空密封中应用的情况。

For its excellent perlormances, fluororubber nas rapidly developed in nign vacuum seals, which are resistance to oils, high temperature and vacuum. This paper mainly describes the thermal stability, permeability and weight loss of fluoro rubber 26 in vacuum, and its appliction at home.