基于光刻技术微小型电极的制作

A New Way of Making Micro Electrode Based on Lithography

针对微细电火花加工中面临的微小型复杂电极制作难的问题,提出了一种基于光刻技术微小型电极的制作方法,其宽度为0.15mm,间隙0.20mm,厚度为6～10μm,适合于加工小型复杂的零件。文中在电火花成型电极制作方面作出了积极的探索。

Aimed at micro electrode making, an efficient way using lithography was proposed and fabricated by EDM technology. The dimensions of the complex electrode were 0.15mm in width, 0.20 mm in spacing and 6～10 靘 in height. The complex electrode is applicable for micro complex part. The way of making micro complex electrode does some availability research on micro complicated electrode in micro EDM fields.