干涉法测量多层透明膜系反射率

Study on Interferometry for Reflectivity of Multilayer Transparent Films

应用干涉法实现透明膜系反射率的测量。将待测膜系镀在两薄玻璃片上 ,并构成 F- P干涉仪 ,根据透射光谱的自由谱宽和干涉峰的半宽值 ,计算出膜系反射率 ,避免了光源波动对测量结果的影响。在实验中所用膜系的反射率小于 98%时 ,测量偏差小于 0 .0 0 4 %。

Reflectivity of transparent films is measured using interferometry. The transparent films are deposited on thin glasses that formed a Fabry-Perot interferometer. The films' reflectivity to be measured is educed from the free spectral range and full width at half maximum of transmission spectrum. Thus the measurement error arises from light source power fluctuation could be eliminated. The measurement bias is less than 0.004% when the films' reflectivity is less than 98% in the experiment.