用于超精密隔振的稀土超磁致伸缩致动器设计

Design of Rare Earth Giant Magnetostrictive Actuator for Ultra-precision Vibration Isolation System

介绍了超精密隔振平台的结构和振动控制原理 ,设计了稀土超磁致伸缩致动器作为驱动装置 ,并阐明致动器的结构和工作原理 ;分析了致动器工作磁场的组成及线圈轴向磁场的分布情况 ;研究了致动器振动控制的频率特性。实验表明所设计的稀土超磁致伸缩致动器具有良好的振动控制效果。

The structure and control principle of ultra-precision vibration isolation platform system are introduced. A rear earth giant magnetostrictive actuator used as driving equipment is designed. The constitution of magnetic field of giant magnetostrictive actuator is analyzed, and the strength of magnetic field of winding is computed. Moreover, the control frequency of actuator is researched. The results of experiment show that the actuator can control vibration effectively.