位移测量元件的微机精化补偿方法及其应用

Microcomputer Aided Compensating Method and Its Application for Displacement Measuring Elements

感应同步器、光栅、磁栅作为位移测量元件被广泛应用于数字式位移测量系统 上，对其制造、安装等引起的系统性测量误差完全通过软件进行补偿修正，可以经济 且有效地提高系统的测量精度及可靠性。根据不同测量元件的特点及其应用的具体情 况，提出了确定补偿点进行补偿的两种方法──等分矩形法和等先插值迭加法。为了 提高补偿速度，对测出的系统性测量误差值，以位移－地址相关列表法存贮于微机内存 中，微机根据采集的绝对位移值直接询址取出对应的误差值进行补偿运算。在大型齿 轮齿形精度就地测量系统中的应用表明，其线位移和角位移测量装置的测量误差分 别由±７．５μｍ和±１．８”降至±１μｍ和±０．４８”。

Inductosyn, grating and magnetic scale are widely used as displacement measuring elements in digital type displacement inspecting systems. Accomplished by special software, compensating the systematic measuring error of the elements which is caused by making and assembling errors is economical and effective to make the accuracy and realiability of the system high. On the basis of the specificity of the measuring elements and the special conditions in the use, two ways to determine the compensating points-equal divided rectangle way and equal divided interpolating adding-up way are given out in the paper. In order to get a high compensating speed, the systematic measuring errors of the elements are previously stored in the memories of the microcomputer by mean's of displacement address relative listing method. According to the absolute displacement sampled, microcomputer may directly address and take out the corresponding error and compensate it during the measuring process. The application in Generating Type On-spot Involute Profile Tester for Large Gears shows that, with this method, the measuring errors of linear and angular displacement measuring assembles are respectively reduced to ±1μm and ±0.48' from ±7.5μm and ±1.8'.