压电直线精密驱动器研究

Precise PZT linear step actuator

提出一种新型的压电直线精密步进驱动器。该驱动器采用仿生运动的原理,以定子主动箝位的方式和双侧薄壁铰链微变形结构,解决了以往压电精密驱动器箝位不牢固、步进频率较低、行程小、分辨率低、速度低、驱动力不稳定等问题。研制的精密直线驱动器能够实现高频率 100 Hz,高速度30 mm/min,大行程>10 mm,高分辨率0.05μm,大驱动力100 N等特点,大幅度提高了压电型步进驱动器的驱动性能。

A new precision linear PZT actuator is proposed to improve its drive capabilities that is based on the piezoelectric (PZT) technology. It adopts the principle of bionics and works in a new mode of stator initiative anchoring/loosening and a distortion structure of double-side thin flexible hinge, which has solved the problem of anchoring/loosening, frequency, journey, resolution and velocity, The experiment shows that the new linear PZT actuator works at a high frequency of 100 Hz, high speed of 30 mm/min, large travel above 10 mm, high resolution of 0.05 μm and high load (100 N).