摘要
应用线切割方法设计了光针轮廓仪伺服机构—音圈电机的结构,使其具有更好的静动态特性和焦点自动跟踪能力。通过改善传统的聚焦误差信号曲线,并利用数字伺服控制方法,在提高系统测量精度的同时,克服了传统对于陡坑或阶梯测量容易脱焦的问题。
The structure of a volume coil motor, as a servo mechanism of optical stylus profilometer, is designed to own superior static and dynamic characteristic and capability of focus tracing by line cutting. Through the improvement of the focusing error signal and applications of the digital control, the measurement precision is heightened, and it is resolved to overcome the problem of deviating focus, and it occurs easily in traditional measurement for step and pit.
出处
《计量学报》
EI
CSCD
北大核心
2005年第1期8-11,共4页
Acta Metrologica Sinica
基金
国家自然科学基金(50175037)
高等学校博士学科点专项科研基金(20020487039)
关键词
计量学
光针轮廓仪
线切割方法
聚焦误差信号
阶梯测量
Metrology
Optical stylus profilometer
Line cutting
Focus error signal
Step measurement
