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Design and Fabrication of Thermo-Optic 4×4 Switching Matrix in Silicon-on-Insulator 被引量:5

SOI热光4×4光开关阵列的研制(英文)
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摘要 A rearrangeable nonblocking thermo-optic 4×4 switching matrix,which consists of five 2×2 multimode interference-based Mach-Zehnder interferometer(MMI-MZI) switch elements,is designed and fabricated.The minimum and maximum excess loss for the matrix are 6.6 and 10.4dB,respectively.The crosstalk in the matrix is measured to be between -12 and -19.8dB.The switching speed of the matrix is less than 30μs.The power consumption for the single switch element is about 330mW. 设计和制作了由 5个 2× 2多模干涉马赫 -曾德开关元组成的重排无阻塞型 SOI 4× 4热光开关阵列 .阵列的最小和最大附加损耗分别为 6 .6和 10 .4 d B,阵列的串扰为 - 12~ - 19.8d B,光开关阵列的开关速度小于 30μs,单个开关元的功耗大约为 330 m W.
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2004年第12期1573-1575,共3页 半导体学报(英文版)
基金 国家基础研究重点发展计划 (批准号 :G2 0 0 0 0 3 66) 国家高技术研究发展计划 (批准号 :2 0 0 2 AA3 12 0 60 ) 国家自然科学基金 (批准号 :60 3 3 60 10 )资助项目~~
关键词 integrated optics SILICON-ON-INSULATOR matrix switches PLC technology 集成光学 马赫-曾德干涉仪 开关阵列 光开关
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参考文献5

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