智能化THSAM—5型反射式声学显微镜及其应用

A THSAM-5 Intelligent Reflection Scanning Acoustic Microscope and application

本文描述了近期研制成功的一台智能化THSMA-5型反射式声显微镜。该机以通用微机为核心控制整机工作,终端显示图象。该机具有较高的表层深层分析能力,已观察出5.1mm深处20μ宽结构形状。它可检测平面、圆柱形零件。该机还具有多种图象处理功能,分析样品参数,具有良好推广应用前景。

The Inteligent THSAM-5 SAM is described in this paper, A current microcomputer is used as control part. The image is displayed on the terminal. Resolution in-depths layers is showen. In the position of 5.1mm from the surface, a structure with 20μm lateral dimension is observed. The ability of processing image and analysing specimen is obtained. The THSAM-5 SAM has opened up fine prospects in popularization and application.