显微激光拉曼光谱法鉴别SiC晶体的多型体结构

Polytype Identification of SiC Crystals by Micro-Raman Spectroscopy

利用显微激光拉曼光谱法对掺氮 6H SiC单晶中的寄生多型体进行了鉴别 ,结果表明其中有 4H SiC和 15R SiC两种寄生多型体。不同SiC多型体的纵光学声子与等离子体激元的耦合模 (LOPC模 )表明 :在掺氮 6H SiC单晶的生长条件下 ,6H SiC的掺氮效应与 4H SiC存在明显差别 ,而与 1 5R

The parasitic polytypes in nitrogen-doped 6H-SiC single crystal were identified by Micro-Raman spectroscopy. The results show that there are two parasitic polytypes such as 4H-SiC and 15R-SiC in 6H-SiC crystal. The longitudinal optical phonon-plasma coupled modes (LOPC modes) of different SiC polytypes show that the nitrogen-doped effect of 6H-SiC is markedly different from that of 4H-SiC, and is similar to that of 15R-SiC under the growth condition of nitrogen-doped 6H-SiC single crystal.