摘要
采用溶胶-凝胶法在Pt/Ti/SiO2/Si基片上制备了掺钕(Nd)的Bi4Ti3O12薄膜(Bi4-xNdx)Ti3O12(x=0.85),将薄膜于空气中710℃退火0.5h,形成BNT多晶薄膜。系统研究了薄膜的结构、电学性质、表面形貌、漏电流、疲劳特性等。结果表明薄膜呈(117)和(00l)的混合取向,显示良好的铁电性(2Pr=60.8μC/cm2),并呈现良好的抗疲劳特性。
Nd-doped Bi4Ti3O12(Bi3.15Nd0.85Ti3O12,BNT) ferroelectric films have been deposited on Pt/Ti/SiO2/Si substrates by sol-gel processing. With the films annealed at 710 ℃ for 30 minutes in the air,the microstructure,electrical properties,surface morphologies,leakage current and fatigue properties of the thin film are studied. The film assumes (117) and (00l) mixed orientation, and has large remanent polarization value of 2 Pr=60.8 μC/cm2 with strong fatigue resistance.
出处
《苏州科技学院学报（自然科学版）》
CAS
2004年第4期40-45,共6页
Journal of Suzhou University of Science and Technology （Natural Science Edition）
基金
国家自然科学青年基金资助的课题(10204016)
关键词
溶胶-凝胶法
铁电薄膜
混合取向
抗疲劳特性
sol-gel process
ferroelectric films
mixed orientation
fatigue resistance
