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Effects of structural parameters and rigidity of driving diaphragm on flow characteristics of micro valveless pump

Effects of structural parameters and rigidity of driving diaphragm on flow characteristics of micro valveless pump
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摘要 The structure and operating principle of micro valveless pump were investigated theoretically and experimentally. The mathematical model of pressure and flow rate within the micro nozzle/diffuser was established to analyze the effects of nozzle/diffuser parameters on the output flow rate of the micro valveless pump.The experiments were carried out with different structural parameters, driving frequencies, vibration amplitudes and stiffness of the driving diaphragms. Effects of the structural parameters and driving conditions on the operation performance of the pump are discussed in detail. The work provides useful reference for structure optimization selection of the driving diaphragm of micro valveless pump. The structure and operating principle of micro valveless pump were investigated theoretically and experimentally. The mathematical model of pressure and flow rate within the micro nozzle/diffuser was established to analyze the effects of nozzle/diffuser parameters on the output flow rate of the micro valveless pump. The experiments were carried out with different structural parameters, driving frequencies, vibration amplitudes and stiffness of the driving diaphragms. Effects of the structural parameters and driving conditions on the operation performance of the pump are discussed in detail. The work provides useful reference for structure optimization selection of the driving diaphragm of micro valveless pump.
出处 《Journal of Zhejiang University Science》 EI CSCD 2003年第1期53-57,共5页 浙江大学学报(自然科学英文版)
关键词 微波无阀泵 MEMS 传动隔膜 优化设计 结构参数 Micro valveless pump, MEMS, Driving diaphragm, Optimal design
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