摘要
介绍一种新型的探测声表面波传输特性的测量技术.实现了各向异性晶体声表面波衍射场分布的一维扫描显示;二维扫描在电视屏上可对声表面波阵面直接成象,在此基础上求出了声表面波相速以及探测声表面波器件表面缺陷.
A new type of measure technique is presented in this paper, which is a valuable tool for stu-ding the properties of SAW. The distributioas of SAW diffraction fields on anisotropic substrates are obtained experimentally by using one-dimensional scanning display. The phase velocity of SAW is estimated and the features of the substrates are detected from the array surface of SAW displayed directly on the TV screen by using two-dimensional laser scanning technique.
出处
《压电与声光》
CSCD
北大核心
1993年第4期34-36,共3页
Piezoelectrics & Acoustooptics
关键词
激光扫描
声表面波
衍射场
传输
laser scanning, surface acoustic wave,SAW diffractional distribution
