抽指延迟线型声表面波温度传感器

SAW Delay Line Temperature Sensor with Tapped IDTs

介绍一种在128°转Y-Z铌酸锂压电晶体材料上研制的新型温度传感器的原理、设计、制造及其特性.与一般温度传感器输出的量是模拟量所不同的.它的输出是频率数字量,故具有很高的灵敏度、分辨率.也可实现与计算机的直接连接,实验结果表明:用抽指型延迟线振荡器研制的声表面波(SAW)温度传感器的灵敏度为—6kHz/C,且具有好的线性.适用于高精度检测.

This paper described the principle, design and characteristics of a new type of temperature sensor,which is implemented on 128° rotated Y-Z LiNbO3 substrate. It is different from other temperature sensors in frequency output,high sensitivity,and can be connected directly with microcomputer. The experi-mental resulte show that the detection sensitivity of the SAW delay line temperature sensor with tapped IDTs is =-6kHz/℃,and the sensor has Unear frequency response. It can be used in exact detection.