氧化锌薄膜热退火特性的研究

Study on the Effects of Annealing on ZnO Film

对退火前后氧化锌薄膜的结构特性、化学组分及化学价态,以及缺陷特性进行了详尽的研究.结果表明,低温热退火是改善氧化锌薄膜结构特性、化学组分及化学价态,并且减少缺陷的良好方法.

Structure of ZnO film,chemical states of Zn and O in the film,and the defect properties are investigated in detail for both the pre-annealed and annealed samples. It is proved that annealing in O2 atmo-sphere at a low temperature is a practical way to improve the structure of the film and the Chemical states of Zn and O in the film, and decrease the defect density as well.