射频微机电系统的军用潜力、开发现状及发展战略研究
摘要
从固态微波应用中的潜在优势出发,对RF MEMS的发展概况及前景作出评论。
出处
《真空电子技术》
2003年第6期8-10,共3页
Vacuum Electronics
参考文献12
-
1Hector J De Los Santos. Introduction to Microelectrom-echanica1(MEM)Microwave Systems[M]. Boston: Artech House,1999.
-
2Richards R J , Hector J De Los Santos. MEMS for RF/Microwave Wireless Applications:the Next Wave[J].Microwave J, 2001:20.
-
3Hector J De Santos ,Richarde R J.MEMS for RF/Microwave Wireless Applications:the Next Wave-Part II[J] .Microwave J, 2001:142.
-
4Lehny R F. Trends in Microsystems for Information Technologies[C].GaAS Mantech Conference,2001,21-24:3.
-
5Miller L M.MEMS for Space Applications[C].SPIE, 3680:2.
-
6Brown E R.MAFET Thrust 3:A Revolutionary Pro-gram for Solid-State Microwave and Millimeter-Wave Power,in Directions for the Next Generation of MMIC Devices and Systems[M].New York: Plenum Press,1997.
-
7PLIgh M L,et a1.Electronically Scanned Arrays Using Micro Electro Mechanical switch (MEMES)Technolo-gy. Proceedings of International Conference on Radar systems[C],1999:507.
-
8美国国防部寻求新的反巡航导弹万案,863先进防御技术通信(A类),2000.
-
9Malezewski A,et a1. X-Band RF MEMS Phase Shifters for Phased Array Applications[J]. IEEE Microwave and Guided Wave Letters, 1999,9(12):517.
-
10Pillans B, et a1.Ka-Band RF MEMS Phase Shifters for Phased Array Applications[J]. IEEE Radio Frequency Integrated Circuits Symposium,2000:195.
-
1徐艳国（编译）.相控阵天线的潜在技术突破[J].电子工程信息,2010(4):28-31.
-
2张蕾.射频微机电系统在雷达上的应用（下）[J].电子工程信息,2011(5):27-32.
-
3陈如明.终端在未来泛在网络中真正体现“融合”[J].通信世界,2009(25).
-
4王雄师,张斌珍,段俊萍,徐苏坪.一种宽频带RF MEMS开关的设计研究[J].真空科学与技术学报,2017,37(3):341-344. 被引量：4
-
5汤亮,郝震宏,乔东海,汪承灏.ZnO薄膜体声波谐振器性能分析和研制[J].压电与声光,2008,30(4):387-389. 被引量：2
-
6CHEN KenLe ZHANG JinWen.Comparison of the RF MEMS switches with dielectric layers on the bridge’s lower surface and on the transmission line[J].Science China(Information Sciences),2011,54(2):396-406.
-
7汤亮,郝震宏,乔东海,汪承灏.薄膜体声波谐振器的梯形射频滤波器设计[J].声学技术,2008,27(2):145-149. 被引量：5
-
8赵继德,李应良,马传龙.基于MEMS共面波导腔的带阻滤波器的设计[J].半导体技术,2005,30(8):34-37.
-
9金铃.射频微机电系统技术现状[J].微波学报,2005,21(6):58-65. 被引量：10
-
10黄继伟,王志功.驱动与信号隔离的单刀双掷RF MEMS开关[J].固体电子学研究与进展,2007,27(3):366-370.
