PEMSIP法沉积的TiN涂层对刀具切削性能的影响

The Influence of TiN Coatings Deposited on Tools by Plasma Enhanced Magnetron Sputter Ion Plating on Tool's Cutting Properties

基片负偏压增加，使等离子体增强磁控溅射离子镀TiN涂层的相组成朝着富氮相及其含量增加的方向发展；由Ti2N和TiN两相组成的涂层硬度最高，可达Hk2460。切削力测定表明，由Ti2N和TiN两相组成的刀具涂层使切削力略有下降。涂层能明显提高刀具耐用度。

Chip minus bias rises, the phases-consist of TiN coating of plasma strengftbening magnetic sputtering ion plating will expand toward nitrogen-rich phase and its content increasing1 The coating of two phases Ti2N and TiN has the highest hardness, up to Hk2460. The cutting tool coating of Ti2N and TiN phases qhakes its cutting force drop slightly.The coating can brightly raise serviceability ratio of tools