光栅干法刻蚀与湿法刻蚀的研究

Research on Dry-Etching Gratings and Wet-Etching Gratings

在光栅的制作中有两种方法:其中一个是湿法,另外一个是干法。本文分别就湿法和干法的实验结果,进行比较。用于法刻蚀方法做出了比较好的一级光栅,证明了干法刻蚀优于湿法刻蚀。

There are two ways in fabricating grating1 one is wet-etching, the other is dry-etching. In this paper, the two methods will be compared in the last ,we have fabrticated 1st order grating usingdry etching.