双焦干涉表面微观轮廓检测

The Double Focus Interference Profiles Testing

本文论述一种高灵敏度的新型表面轮廓检测系统。该系统由双焦透镜偏振共路干涉系统及共模抑制电子处理系统两部分组成。可用于各种材料表面的无损检测。该系统的纵向灵敏度小于20A,横向灵敏度小于2μm。与Talysurf-6触针式表面轮廓仪对同一样品表面测试结果进行了比对,获得了满意的结果。

A new type profilometer of high sensitivity described in thispaper.This instrument consist of a double focus polarization interferencesystem and a common-mode rejection electronic processing system.The profilo-meter has the advantages with the two interference beams being reflected fromdifferent areas of the test surface and insensitive to environmental turbulence.Measurement comparisons with the Talysurf-6 machanical stylus profilometerare discussed.The instrument has a sensitivity to height of better than2nm and the lateral sensitivity better than 2 micrometres.