光散射法测量表面微粗糙度

Measurement of Surface Roughness By Means of Scattering Detection

本文阐述了基于电偶极子辐射模型的矢量散射理论及以光散射法测量表面微粗糙度的基本原理;介绍了基于该理论研制而成的光散射空间角分布测量系统的原理与结构;最后给出了两个在此测量系统上完成的实验及结果。

Firstly,the main procession of the vector scattering theory based on dipoleradiation approach is reviewed,and then after illustate the principle of the measurement of opticalsurface roughness using method of scattering detection,the paper clearly discribe the equipment,which is set for the mesurement of angular distribution of scattering based on the theory which isgiven before.Finally,two experiments and their results are presented.