摘要
本文根据Leger激光散斑相干性理论,讨论测量表面粗糙度σ时两相干光束之间夹角的变化对测量精度和测量范围的影响,提出了合理选择夹角的理论依据,并从实验上得到了验证。
The effect of the change of angle between two coherent beams on measuring accuracy and range for measuring the surface roughness is discussed according to Leger laser speckle coherent theory, a theoretical criterion of reasonably choosing the angle between two beams is given and verified experimentally.
出处
《应用光学》
CAS
CSCD
1993年第2期60-64,共5页
Journal of Applied Optics
关键词
测量
表面粗糙率
散斑法
相干性
measurement
laser
speckle
coherence
surface roughness
