摘要
本文提出采用平凸光学谐振腔准光柱聚焦精密激光打孔方法。理论分析和试验表明,打孔精度优于一般光锥聚焦法打孔,可与光柱聚焦法打孔相比美。
In this paper we put forward a method of precision laser drilling with plane convex resonator and fo-cusing of quasi-light column. The theoretical analysis and experiments show that the accuracy of hole is better thancommon focusing of light cone, and this method can match the focusing of light column in beauty.
出处
《应用激光》
CSCD
北大核心
1993年第3期103-105,共3页
Applied Laser
基金
国家自然科学基金
关键词
激光打孔
平凸谐振腔
准光柱聚焦
laser drilling
plane convex resonator
quasi-light lolumn