摘要
本文研究用脉冲红外激光制备氮化硅超精细粉末,在400℃温度下,SiCl_4与NH_3反应,生成中间产物——Si(NH)_2,中间产物再用红外脉冲激光辐照分解成氮化硅超精细粉末。
The synthesis of silicon nitride ultrafine powelers has been systemacally studiedby pulse infrareal laser irradiation. Fundamental thinking is, Si(NH)_2 is formed from SiCl_4 and NH_3at 400℃, and then, Si(NH)_2 decomposes into Silicon nitride ultrafine powder by pulse infrared laserirradiation.
出处
《应用激光》
CSCD
北大核心
1993年第5期221-224,共4页
Applied Laser
关键词
脉冲
红外激光
氮化硅
超细粉末
pulse IR-laser
silicon nitride
ultrafine powder
