电子散斑干涉技术的精度研究

A Study on the Accuracy of Electronic Speckle Pattern Interferometry

通过电子散斑测量离面位移的实验研究,对电子散斑干涉计量的测量精度进行了评估,分析了误差来源并提出了提高该技术测量精度的措施。

In this paper, the accuracy of electronic speckle technique is firstly discussed. Byquantitative experiments and comparison with the theoretical results, the reason of creating errorsof the technique is analysed and the measures of improving accuracy of electronic speckle techniqueis also proposed.