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Preparation and Anti-Oxidation Properties of Ti(CN) Films Deposited by P CVD 被引量：1

Preparation and Anti-Oxidation Properties of Ti(CN) Films Deposited by P CVD
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摘要 Using metallo-organatic compound TPT as the source of Ti, H13 mould steels were coated with Ti(CN) films by plasma-assisted chemical vapor deposition (PCVD) and the properties of Ti(CN) films were studied. Under the appropriate temperature and pressure, Ti(CN) films on H13 mould steel surfaces had the highest micro-hardness of HV1760 at 500°C, and the films showed excellent anti-oxidation property below 500°C. The lifetime of Ti(CN)-coated augers and dies could be enhanced 7 and 4 times longer than those of untreated respectively. Using metallo-organatic compound TPT as the source of Ti, H13 mould steels were coated with Ti(CN) films by plasma-assisted chemical vapor deposition (PCVD) and the properties of Ti(CN) films were studied. Under the appropriate temperature and pressure, Ti(CN) films on H13 mould steel surfaces had the highest micro-hardness of HV1760 at 500°C, and the films showed excellent anti-oxidation property below 500°C. The lifetime of Ti(CN)-coated augers and dies could be enhanced 7 and 4 times longer than those of untreated respectively.
作者 PANYing-jun CHENShu-hua WUXin-jie LIPing-sheng ZHANGXi-ju
机构地区 DepartmentofMaterialandMetallurgy
出处 《材料热处理学报》 EI CAS CSCD 北大核心 2004年第05B期851-853,共3页 Transactions of Materials and Heat Treatment
关键词 PCVD 钛薄膜 反氧化 显微硬度 PCVD, Ti(CN) film, Oxidation
分类号 TN304.055 [电子电信—物理电子学]
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材料热处理学报
2004年 第05B期

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