光学微结构的超精密加工技术

Ultra-Precision Machining of Optical Microstructures

微结构光学元件在光电产品及光通讯产品中的应用日益广泛.采用多轴超精密机床加工光学微结构,可达到亚微米级形状精度和纳米级表面光洁度的高精度水平.详细介绍了光学自由曲面及光学微结构的超精密加工技术,并开发了适合超精加工微型槽和微透镜列阵的刀具轨迹自动生成软件.

Optical microstructures are crucial to the development of complex and micro-optical-electro-mechanical devices used in many photonics products. The fabrication of high quality optical microstructures is based on ultra-precision freeform machining technology which allows direct machining of freeform surfaces with sub-micro-metric form accuracy and nanometric surface finish. The application of ultra-precision freeform machining to the fabrication of optical microstructures is addressed, and the methodologies for the development of the tool path generator for two optical products are discussed.