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光学材料的激光微加工研究进展与应用前景 被引量:5

Progress and prospect of laser micro-machining researches and applications of optical material
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摘要 综述了国内外在光学材料激光微加工方面的研究成果和应用状况,并展望了其发展前景。 Laser micro-machining of optical materials is one of the most promising fields. In this article, the research, production and application both at home and abroad are reviewed, and its application prospects are presented.
作者 江超 王又青
出处 《激光与光电子学进展》 CSCD 2003年第5期52-58,共7页 Laser & Optoelectronics Progress
关键词 光学材料 激光微加工 研究进展 应用前景 脉冲激光器 抛光加工 光学投影设备 laser micro-machining, optical material, excimer laser, femtosecond laser
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