EL薄膜的溅射工艺

Sputtering Process for Making EL Films

本文介绍了采用分立型复合溅射靶制造 EL 薄膜的工艺。用这种方法可严格控制 EL 薄膜的化学计量及掺杂含量,并使掺杂物在薄膜里呈梯度分布。

This article relates to a sputtering process for producing EL films by adopting a plurality of discrete sputtering targets.Thus the stoichiometry and doping levels of the above EL films can be closely controled and a graded dopant profile can be provided in the films.