真空容器的漏气率与升压率

Leak Throughput and Rate of Pressure Rise of Vacuum Chamber

本文论述了与抽气系统隔断后，引起真空容器内气体升压的两种因素，即外部气体的漏入和内部气体的释放。并分析了漏气率与升压率和容积三者相互制约的变化关系。提出真空设备允许升压率及允许漏气率的规定方法和依据以及升压车和漏气率的测试原则。

In this paper,after the chamber is isolated from pumping system, the two factors of gas pressure rise in vacuum chamber are presented. The gas leakage from outside and gas release in the chamber and the relation among the leak rates, pressure rise rate and volume are analyzed. Give the permissible pressure rise rate of vacuum equipment and the method and principle to deter- mine the permissible leak rate, measuring principle of pressure rise rate and leak rate