AGA-100型四极质谱计分析和真空系统污染后的清洗

Cleaning of Analysis and Vacuum System of AGA-100 Quadrupole Mass Spectrometer which was Contaminated

本文介绍了ＡＧＡ－１００型四级质谱计分析和真空系统污染后的清洗方法，并对清洗前后的性能指标做了对照测试，结果表明此法是可行的．

In this paper,a method of cleaning the contaminated analysis and vacuum system of AGA-100 quadrupole mass spectrometer is introduced. The contrast tests of main spesifications which at the beginning and after the cleanning have been done,the results show that the method is available.