一种新颖的石英晶体微量天平探头

A New Crystal Probe of Microbalance

本文研制了一种用于高精度膜厚监测的真空微量天平探头：半导体致冷器件恒温探头。它具有测量精度高、对真空系统无污染及结构简单等优点，有实用价值。

In this paper, a probe of vacuum microbalance to monitor and measure for high accuracy of film thickness is introduced, thermostatic probe of the semiconductor refrigeration device. High accuracy of measurement, non-contamina- tion for vacuum system, simple structure and practical value.