离子管内氢气分压强的质谱定量测定

Quantitative Determinaton with QMS of Hydrogen Gas Partial Pressure in Gas Discharge Device

本文简要介绍了利用四极质谱定量分析技术对某离子管管内氢气分压强与氢发生器加热功率关系的测定结果，同时也给出了附在该离子管上的微型钛泵对管内残气成分影响的质谱分析结果。

In this article the relationship between the hydrogen gas parlial pressure and the feed power provided for hydrogen gas generator are introduced with the aid of gas quantitative anaysis with quadrupole mass spectrometer,the examples of the effect of rmicro ion-pump fixed to gas discharge device on residual gas are also given.