真空控制中自控方式选择的探讨

Research on Selecting the Automatic Control Modes for the Vacuum Control

本文介绍了真空自动控制的基本类型以及由继电器、压强控制器、可编程控制 器、微型计算机组成的真空自动控制系统的特点。提出了各种真空设备及真空系统自动 控制方式的最佳选择方案．

This paper introduces the fundamental types of the vacuum automatic control and the characteristics of the vacuum automatic control system which is composed of relay,pressure controller,programmable controller and microco- mputer.It also puts forth the best selection of the ways of automatic for all kinds of vacuum equipments and vacuum systems.