摘要
本文叙述ＺＺ－３２００Ｊ型高真空镀膜机的结构性能并就设备中蒸发源的最佳配置。真空系统软连接等问题进行探讨。
In this paper, the structure performance of tile high vacuum coater ZZ-3200J, and the optimum allocation of evapouration source in equipment are presented. And study on the soft connection of vacuum system and so far.
出处
《真空》
CAS
北大核心
1993年第4期46-48,45,共4页
Vacuum
