大面积矩形电弧蒸发源电磁场的研究

Study on Magnetic Field Intensity Produced by Electromagnet Coil on Large Rectangular Target

大面积矩形电弧蒸发源合理的设置靶源磁场并有效的控制电弧弧斑的运动是十分重要的。本文基于大量的试验研究对电磁场在靶面各处产生的磁场强度的计算进行了理论推导，建立了数学模型，并进行了比较精确的计算。计算结果与实测值很好的吻合，该计算可作为大面积矩形电弧蒸发源电磁场设计的依据。

It is important to set the magnetic field reasonably and to control the movement of arc on large rectangular target. This paper conducts the theory study for calculation of magnetic filed intensity produced by eletromagnet coil on target surface and sets up related mathematic model. By this model the results of calculation are quite in conformity with that obtained from experiments. The calculated results obtained by the model can be considered as an important basis for design of large target.