用氧化还原反应气体清洗不锈钢超高真空系统

Cleaning Ultrahigh Vacuum Systems of the Stainless Steel by Oxidation and Reduction Reactive Gas

对粒子加速器和储存环的超高真空系统，消除其表面污染的标准方法是化学清洗、真空炉焙烧、辉光放电清洗（ＧＤＣ）及原位烘烤真空系统．本文介绍一种可替代辉光放电的清洗方法：用一氧化氮反应气体进行清洗（ＲＧＣ），它已被用于处理几种不锈钢制作的加速器真空室，用ＮＯ气体处理的效果与其它方法相比，优于普通化学清洗和真空炉焙烧，完全可以和辉光放电清洗相比较，却避免了溅射情况下可能引起的表面损伤．

Chemical cleaning vacuum firing, glow discharge cleaning (GDC), and in situ bakeout have become standard practice, for removing surface contaminants in the ultrahigh vacuum systems of particle accelerators and storage rings. In this paper, an alternative method of glow discharge cleaning, the reactive gas cleaning (RGC) with nitric oxide (NO), has been studied4 It was applied to several accelerator vacuum chambers made .of stainless steel. The effectiveness of the NO treatment has been compared with those of other treatments and found to be superior than vacuum firing alone. and is compatible with that of glow discharge cleaning.