采用补硫技术的ZnS∶Mn蒸发膜的成份与结构的研究

Investigation of Composition and Structure of ZnS:Mn Evaporating Films with Sulfur-Supplying

本文介绍了电阻蒸发ZnS∶Mn薄膜在硫饱和蒸汽压下进行热处理的工艺。通过AES和XRD分析及带隙宽度的测试,结果表明:此法所制备的薄膜有较好的化学计量比,且具有电致发光薄膜所需要的六方结构。

Technic of annealing ZnS: Mn thin films deposited by thermal evaporation in sulfur saturated vapor was described. Results of AES and XRD analyses and the measurement of the energy gap showed that thin films made in this way have better stoichiometrie proportion and hexagonal system needed in electroluminescent thin films