磁控溅射沉积NiCrAlY涂层中的氩及其对氧化行为的影响

THE EFFECT OF Ar EXISTENCE IN NiCrAIY COATING ON OXIDATION BEHAVIOR OF COATING

用直流磁控溅射沉积NiCrAlY涂层。发现使用较高的负偏压时,涂层中掺有氩,其含量与负偏压的立方成正比。用SEM和TEM观察,发现高偏压下沉积的涂层中有微孔和微裂纹。因此,过高的负偏压导致涂层的氩含量激增,以至严重降低涂层的周期氧化性能。

The protection of Ni -base alloy by NiCrAlY coating deposited by magnetic sputtering has been studied. It is found that argon permeates into NiCrAlY coating during the operation at higher negative bias. The content of argon in the coating is proportional to the cube of the negative bias. It is also observed that there are microporosities and microcracks in the coating deposited at high negative bias by SEM and TEM. The cyclic oxidation performance of the coating decreases severely due to the existence of argon in the NiCrAlY coating. The higher the negative bias is during the operation of forming NiCrAlY coating, the lower the cyclic oxidation performance of the coating.