俄歇定量分析基体效应校正因子的获得

A NEW METHOD FOR MATRIX EFFECT CORRECTION IN AUGER QUANTITATIVE ANALYSIS

本文探试了一种俄歇定量分析基体效应校正因子获取的新方法。通过测量淀积过程中的俄歇强度——时间曲线,并对此进行拟合,得到定量分析所需的相对背散射因子和相对非弹性碰撞平均自由程。将它们用于合金样品的定量分析,得到了较好的结果。实验表明,非弹性碰撞平均自由程效应的校正和背散射因子的校正对定量分析是同样重要的。

A new method has been developed for obtaining correstion factors of matrix effects of quantitative Auger analysis (QAA). The Auger signal -time plot was measured during sputter -deposition,and a fitting procedure was then carried out so as to obtain the two key factors in QAA,i. e. ,the relative backscattering factor and the relative inelastic mean free path of electron. It is shown that the QAA result is better with both factors taken into account for correction instead of only one of them.