机械真空泵振动控制的研究

RESEARCH ON THE VIBRATION CONTROL OF MECHANICAL VACUUM PUMP

机械真空泵是组成真空系统的必不可少的部分,它的振动必须严格控制,因为泵的振动不仅反映泵的设计、制造水平。过大的振动将严重影响真空系统的稳定性、限制真空系统的安装位置。本文通过理论分析和实验证明,泵的主要振源来自运动系统所产生的不平衡惯性力,泵的振动特点是整体振动,减少振动的有效方法是进行动力分析和动平衡,并用实验验证结果。

Mechanical vacuum pump is an important part of vacuum system. The vibration of pump must be controlled strictly, because it indicates the level of pump design and manufacture. Moreover, strong vibration will influence the stability and confine the installation position of vacuum system. Our theoretical and experimental analysis shows that the dominant factor is unitary vibration. The effective measure to reduce vibration is the use of dynamic analysis and dynamic balance. Finally, the results are demonstrated by experiments.