基于MOEMS技术的F-P光开关的设计

Design of the F-P Optical Switch Based on MOEMS Technology

Fabry -Perot(F -P)干涉仪是很多与波长相关的光学元器件的核心结构 ,通过研制基于MOEMS技术的F -P光开关 ,可以得到研制一大类MOEMS选频器件的基本设计方法和基本工艺步骤。文章给出了能完全与现有IC工艺相结合 ,采用Si,SiO2 和Si3N4 材料的多层介质结构的F -P光开关的设计方法和设计尺寸及其光性能的模拟结果 。

The Fabry-Perot interferometer is the main structure of many optical components bearing a relation to wavelength. From the research of F-P optical switches based on MOEMS technology, we can obtain basic method and technical process of many kinds of MOEMS components. In this paper, we give the design method and size of the F-P optical switch based on the existing MEMS technology and multilayer medium structure which is made of Si, SiO 2 and Si 3N 4. The simulation results of the component performance have laid firm foundation for the future research of optical switches and more complicated ones such as optical filters.