半导体器件铝腐蚀的判别方法研究

A RESEARCH ON IDENTIFICATION OF ALUMINUM CORROSION OF SATELLITE SEMICONDUCTOR DEVICE

半导体器件内部铝腐蚀是卫星用半导体器件主要的失效模式之一,快速准确地判断铝腐蚀具有重要意义。文章给出了判别方法和程序,并对方法中的关键技术进行研讨。

One of the main failure modes of the satellite semiconductordevices is the aluminium corrosion within package in the late 1980 s.Therefore,fast and accurate identification of this failure mode is veryimportant.This paper provides the method and procedure for identifi-cation of aluminium corrosion and discusses the key techniques.