一种用于对长直导轨的微小不平度进行动态测量的方法

A DYNAMIC METHOD OF MEASURING SMALL UNEVENNESS OF LONG LINEAR SLIDEWATS

探讨了一种能对长直导轨的微小不平度进行高精度实时测量的新方法．其原理是用一个光栅与激光干涉条纹组成莫尔条纹，利用莫尔条纹的放大作用将干涉条纹在微小角变下的微小移动放大几千倍，从而大大提高了测量灵敏度，使测量精度提高到０．５″．

This paper discusses a new high-accuracy measuring method for real-time measurement of small unevenness of long linear slideways. By means o.f the magnifying effect of Moirewhich consists of grating and laser interferometric fringes, the small displacements of interferometric fringes,which are caused by small angular change,are magnified several thousands times,thus,the sensitivity of measuring system is greatly improved. The result shows that the measurement of small unevenness is accurate within 0. 5'.