摘要
本文讨论了圆光栅细分误差及其测量,提出了不采用高精度标准件的圆光栅细分误差测量法——时间平均法,并通过实际测试结果证明了时间平均法的可行性。
This paper deals with subdivision error of circular grating and its measurement. A new method, time interval averaging method(TIAM), is proposed in which no highly precise standard apparatus is used.The experiments demonstrate the feasibility of TIAM.
关键词
光栅刻划
平均误差
动态测量
光栅
Grating ruling
Mean error
Dynamic measurement
Time interal averaging method
