摘要
本文通过对运算电容式传感器及铝氧化膜厚度测试的实验研究,分析了影响测试精度的主要因素,并给出了校正方法和实用测量模型。
The present paper Js intended to analyze the operationol capacitive transducer for measuring the thickness of aluminium exidic film. Based on the principle of capacitive transducer measurement, a practical film thickness measuring model is offered.
关键词
铝氧化膜
厚度
厚度计
电容传感器
Capacitve transducer
Capacitance measuring instruments
Thin films
Thickness gouges
