摘要
本文介绍一种结构改进了的硅基微静电马达。通过在微马达转子下面集成光伏器件实现了对马达转速的片内检测,这对于实现转速自动控制和制作各种传感器有重大意义。利用复合膜牺牲层腐蚀技术制成了一种曲颈状轴承,该轴承能够大大减小马达转动时的摩擦阻力矩。微静电马达转子直径分100和120μm两种,膜厚约2μm,定子与转子的空气间隙为2μm。初始测量结果表明该微马达有良好的性能,具有实用化前景。
A structure improved silicon based micro electrostatic motors is described. On-chip detectionof micromotor rotation speed is realized by fabricating photovoltaic devices on the siliconsubstrate beneath the rotors, and this is very important to realize the automatic control ofrotation speed and fabricating various sensors.By the use of SiO_2/PSG composite sacrificiallayer technology, a curved bearing structure that greatly reduces the frictional torque is fabricated.The micromotors are between 100 and 120μm in diameters, and the air gap between rotorsand stators is 2μm only.The initial test results show that the micro electro-static motorspossess some good performances and are promising in the near future apllication.
