中能弹性背散射电子的角分布在表面成分分析中的应用

The determination of surface composition from the angle distribution of elastically backscattered medium energy electrons

本文从理论上证明中能弹性背散射电子的角分布可以用来分析样品中原子的浓度,并对金、铜及金铜合金进行了分析。结果表明中能弹性散射电子完全可以用来进行成分分析。在本特例中,在未加任何修正的情况下,由本方法得到的浓度和实际值的误差只有5％。

The way of using angle distributions of backscattered medium energy electron is discussed in this paper. In addition,the angle distribution of Cu,Au,and CuAu alloy were measured experimentally and calculated with this method. The relative error between the real concentration and calculated concentration is only 5%. So we suggest the backscattered medium energy electron as a new tool in surface analysis.