期刊文献+

微多晶硅梁开关振荡器 被引量:2

Micro Polysilicon Beam Switch Vibrator
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摘要 本文提出了一种新型的多晶硅梁微静电开关结构,并在考虑硅梁固定边张力的情况下对多晶硅梁的受力弯曲、静电吸合等情形进行了有效的静力学理论分析。 利用微静电开关的充电吸合、放电弹开这一电、机过程,本文还实现了一种成本极低的微硅梁静电驱动振荡器。初步研究结果表明,硅梁的振动频宽大约为2.1kHz,振动幅度较小,振动平衡点在下电极附近。 This paper proposes a novel micro electro-static switch structure of polysilicon beam, and makes an effective statics analysis for the forced bending and the electrostatic switching process of polysilicon beam by considering the fixed boundary tensions. Utilizing the electro mechanical process corresponding to charge-and-switch-on and discharge -and-switch-off of the micro electro-static switch, it also realizes a very chcap micro polysilicon beam vibrator driven by static electricity. The results of the initial study show that the maximal output frequency is about 2. 1kHz, the vibrating amplitude is very small and the vibrating balance point is close to the lower electrode.
出处 《Journal of Semiconductors》 EI CAS CSCD 北大核心 1993年第6期331-336,T007,T008,共8页 半导体学报(英文版)
关键词 振荡器 硅梁振荡器 静电开关 Crystalline materials Vibrators
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参考文献1

  • 1张福范,弹性模板,1984年

同被引文献11

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  • 9陈钰,洪志良,朱江.采用0.25μmCMOS工艺、适用于LVDS驱动器的高性能多相时钟生成器的设计[J].Journal of Semiconductors,2001,22(8):1069-1074. 被引量:7
  • 10王钊,刘飞,吉利久.新型双环路电流型压控振荡器[J].Journal of Semiconductors,2002,23(3):305-310. 被引量:5

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